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Property of tin-oxide thin films grown using a reactive-metal ion beam, an oxygen gas ion beam, and a hybrid ion beam

Title: Property of tin-oxide thin films grown using a reactive-metal ion beam, an oxygen gas ion beam, and a hybrid ion beam

Authors: 송석균; 최원국; 정형진; 고석근; 이정용; 백홍구

Keywords: ion beam

Issue Date: 1996-01

Publisher: Ungyong Mulli (The Korean physical society)

Citation: VOL 9, NO 5, 686-694

URI: https://pubs.kist.re.kr/handle/201004/9957

Appears in Collections:: KIST Publication > Article

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