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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.date.accessioned2024-01-13T00:00:59Z-
dc.date.available2024-01-13T00:00:59Z-
dc.date.issued1996-05-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99826-
dc.title실리콘막의　두께　조절방법　및　장치-
dc.typePatent-
dc.date.registration1996-05-15-
dc.date.application1992-09-08-
dc.identifier.patentRegistrationNumber99526-
dc.identifier.patentApplicationNumber92-16394-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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