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dc.contributor.author한경섭-
dc.contributor.author배동식-
dc.contributor.author이승용-
dc.contributor.author박상환-
dc.contributor.author정무수-
dc.date.accessioned2024-01-13T00:01:38Z-
dc.date.available2024-01-13T00:01:38Z-
dc.date.issued1997-10-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99874-
dc.title강도　및　전기적　물성이　개선된　세라믹스　증착용기　및　그의　제조방법-
dc.typePatent-
dc.date.registration1997-10-01-
dc.date.application1995-02-22-
dc.identifier.patentRegistrationNumber0125016-
dc.identifier.patentApplicationNumber1995-0003400-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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