KIST Library Institutional Repository

N2O반응　가스를　이용한　산화물　박막 증착방법

Author

이동헌; 정형진; 이전국; 김태송

Assignee

한국과학기술연구원

Regitration Date

1999-10-18

Registration No.

0239008

Application Date

1997-07-07

Application No.

1997-0031340

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/99887

Appears in Collections:

KIST Patent > Others

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