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dc.contributor.author주병권-
dc.contributor.author오명환-
dc.contributor.author최우범-
dc.contributor.author이덕중-
dc.date.accessioned2024-01-13T00:02:39Z-
dc.date.available2024-01-13T00:02:39Z-
dc.date.issued2000-08-03-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/99944-
dc.title반도체기판의　정전　열　접합　방법-
dc.typePatent-
dc.date.registration2000-08-03-
dc.date.application1997-09-11-
dc.identifier.patentRegistrationNumber270611-
dc.identifier.patentApplicationNumber97-46677-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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