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Issue DateTitleAuthor(s)
2018-08Engineering of AlON interlayer in Al2O3/AlON/In0.53Ga0.47As gate stacks by thermal atomic layer depositionLee, Woo Chul; Cho, Cheol Jin; Park, Suk-In; Jun, Dong-Hwan; Song, Jin Dong; Hwang, Cheol Seong; Kim, Seong Keun
1

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