Browsing by Author Benjamin Y. H. Liu

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Showing results 1 to 5 of 5

Issue DateTitleAuthor(s)
1998-06Investigation of aerosol spatial distributions downstream of a critical orifice at low pressure배귀남; Patrick D. Kinney; Benjamin Y. H. Liu, et al
1996-01Particle behaviorin vacuum systems :배귀남; Patrick D. Kinney; David Y. H. Pui., et al
1998-04Performance characteristics of in-situ particle monitors at sub-atmospheric pressures배귀남; Benjamin Y. H. Liu
1993-01Performance characteristics of the PMS SAS-3600 wafer surface scanner.채승기; Benjamin Y. H. Liu; 배귀남, et al
1993-01Sizing accuracy, counting efficiency, lower detection limit and repeatability of a wafer surface scanner for ideal and real-world particles.배귀남; Benjamin Y. H. Liu; 채승기