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Showing results 1 to 5 of 5

Issue DateTitleAuthor(s)
2004-01Fabrication of 3-D structures by inclined and rear-side exposures이준섭; 신현준; 문성욱; 송석호; 김태엽
-Fabrication of 3-D structures with different scales and angles using inclined and bottom side expose method at selected position이준섭; Shin Hyun Joon; Moon Sung Wook; 송석호; KIM SHIN GEUN
-Fabrication of 3D MEMS antenna array structure for uncooled IR sensor using MRPBI system and plastic micromachiningJONG-YEON PARK; Kun-Tae Kim; 이준섭; LEE TAE HUN; Kwon Gwang Min; Shin Hyun Joon; Moon Sung Wook; PARK JEONG HO
-Fabrication of photoresist V-groove for alignment of micro optical elements이준섭; Shin Hyun Joon; 송석호; 김필수; 오차환; Moon Sung Wook
2004-11-12감광제를　이용한 V groove 구조물 제조방법문성욱; 이준섭; 신현준
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