Browsing by Subject 입자침착속도

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Showing results 1 to 4 of 4

Issue DateTitleAuthor(s)
1995-01A study on the particle deposition toward a rotating wafer surface.배귀남; 안강호
1994-01Airflow velocity effect on particle deposition toward a horizontal wafer surface.배귀남; 이춘식; 박승오
1995-01Measurement of particle deposition velocity toward a vertical wafer surface.배귀남; 이춘식; 박승오, et al
1994-01Thermophoretic effect on particle deposition toward a horizontal wafer.배귀남; 이춘식; 안이기, et al

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