DSpace at KIST

Browsing bySubjectwafer surface scanner

Jump to:
All A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
가 나 다 라 마 바 사 아 자 차 카 타 파 하
  • Sort by:
  • In order:
  • Results/Page
  • Authors/Record:

Showing results 1 to 3 of 3

Issue DateTitleAuthor(s)
1994-07MEASUREMENT OF PARTICLE DEPOSITION VELOCITY TOWARD A HORIZONTAL SEMICONDUCTOR WAFER BY USING A WAFER SURFACE SCANNERBAE, GN; LEE, CS; PARK, SO
-Performance characteristics of the PMS SAS-3600 wafer surface scanner.채승기; Benjamin Y. H. Liu; Bae Gwi-Nam; MYONG HYON KOOK; Chun-Sik Lee
1993-01Sizing Accuracy, Counting Efficiency, Lower Detection Limit and Repeatability of a Wafer Surface Scanner for Ideal and Real-World ParticlesBenjamin, Y.H.L.; Chae, S.-K.
1

BROWSE