KIST Library Institutional Repository

Demonstration of Micro-cantilever Devices using Pb(Zr,Ti)O3 Thin Films SOl-gel Processed on Nanocrystalline Diamond Thin Films

Authors

Jeung-hyun Jeong; JONG-KEUK, PARK; Yun Ju Heon; Hwang Gyu Weon; Lee, Wook Seong; Baik, Young Joon

Citation

Materials Research Society

Keywords

Nanocrystalline diamond film; Piezoelectric; Cantilever beam; Micro actuators and sensors

URI

https://pubs.kist.re.kr/handle/201004/101688

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML