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MEMS Fabrication of Microchannel with Poly-Silicon Layer and Application to Microchip Electrophoresis

Other Titles

다결정 실리콘 층이 형성된 마이크로 채널의 MEMS 가공 제작과 마이크로 칩 전기영동에의 응용

Authors

Kim Tae Ha; Myung-Suk Chun; Kangtaek Lee

Citation

제9회 한국 MEMS 학술대회, v.9, pp.598 - 601

Keywords

MEMS Fabrication; Microchip Electrophoresis; Microchannel; Optical Slit; DRIE

URI

https://pubs.kist.re.kr/handle/201004/101938

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KIST Conference Paper > Others

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