KIST Library Institutional Repository

Formation of GaAs Nanohole Array using Nanoporous Alumina Mask by Inductively Coupled Plasma Reactive Ion Etching

Authors

Jung mi; Jung Yong-Woo; Lee, Seok; Byun, Young Tae; Jhon, Young Min; Kim, Sun Ho; Mho,Sun-il; Woo, Deok Ha

Citation

제 13회 한국반도체학술대회, pp.1125 - 1126

Keywords

GaAs nanohole; Nanoporous alumina; ICP-RIE

URI

https://pubs.kist.re.kr/handle/201004/104452

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML