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Other Titles
단일전구체를 이용한 SiC 박막의 성장
Authors
KIM NA-RI변동진진정근노대호Kim, Jae Soo이재훈
Citation
2004년 금속재료학회 추계학술대회, pp.76 - 77
URI
https://pubs.kist.re.kr/handle/201004/104615
Appears in Collections:
KIST Conference Paper > Others
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