KIST Library Institutional Repository

단일전구체를 이용한 SiC 박막의 성장

Authors

KIM NA-RI; 변동진; 진정근; 노대호; Kim, Jae Soo; 이재훈

Issue Date

2004-10

Citation

2004년 금속재료학회 추계학술대회, pp.76 - 77

URI

https://pubs.kist.re.kr/handle/201004/104615

Appears in Collections:

KIST Conference Paper > Others

Export

RIS (EndNote)

XLS (Excel)

XML