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Resonance Properties and Mass sensitivity of microcantilever sensors actuated by piezoelectric PZT thick films

Authors

JAE HONG PARK; Kwon Tae-Yun; KIM, HYUNG JOON; KIM SEUNG RAE; Yoon, Dae Sung; 천채일; Kim, Tae Song

Citation

International conference on Electroceramics (ICE-2005)

Keywords

thick film; cantilever

URI

https://pubs.kist.re.kr/handle/201004/104640

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KIST Conference Paper > Others

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