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Measuring the Young's modulus of microstructure using parallel plate electrostatic microactuator

Authors

Tae Yeop Kim; Jae Sun Hur; Moon, Sung Wook; Shin, Hyun Joon; Sang Yeol Lee

Citation

The 12th Seoul International Symposium on the Physics of Semiconductors and Applications, pp.139

Keywords

Young' s modulus; electrostatic actuator

URI

https://pubs.kist.re.kr/handle/201004/105670

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KIST Conference Paper > Others

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