Characterizations of vanadium-tungsten-oxide bolometric thin films for uncooled IR detectors

Other Titles
비냉각형 적외선 감지소자용 바나듐 텅스텐 산화물의 제조 및 특성 분석
Authors
HAN YONG HEEMoon, Sung WookShin, Hyun JoonKim, Shin KeunAn Mi Suk김근태최인훈오명환
Citation
제6회 한국 MEMS 학술대회, pp.281 - 286
Keywords
볼로메타; 바나듐; 텅스텐; tcr; Microbolometer; TCR; vanadium-tungsten-oxide; oxidation; MEMS
URI
https://pubs.kist.re.kr/handle/201004/105915
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KIST Conference Paper > Others
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