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Characterizations of vanadium-tungsten-oxide bolometric thin films for uncooled IR detectors

Other Titles

비냉각형 적외선 감지소자용 바나듐 텅스텐 산화물의 제조 및 특성 분석

Authors

HAN YONG HEE; Moon, Sung Wook; Shin, Hyun Joon; Kim, Shin Keun; An Mi Suk; 김근태; 최인훈; 오명환

Citation

제6회 한국 MEMS 학술대회, pp.281 - 286

Keywords

볼로메타; 바나듐; 텅스텐; tcr; Microbolometer; TCR; vanadium-tungsten-oxide; oxidation; MEMS

URI

https://pubs.kist.re.kr/handle/201004/105915

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KIST Conference Paper > Others

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