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V₂O5/V/V₂O5 based uncooled infrared detector by MEMS technology

Other Titles

V₂O5/V/V₂O5 다층박막 및 MEMS 기술을 이용한 비냉각형 적외선 감지 소자의 제작

Authors

한용희; 허재성; 최인훈; KIM GEUN TAE; Shin Hyun Joon; 치엔; Moon Sung Wook

Citation

2003 한국재료학회 춘계학술대회

Keywords

볼로미터; MEMS; 비냉각; 바나듐 옥사이드

URI

https://pubs.kist.re.kr/handle/201004/106262

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KIST Conference Paper > Others

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