Fabrication of 3D MEMS antenna array for infrared detector using novel UV-lithography apparatus, plastic micro machining and micro assembly technique

Authors
JONG-YEON PARKKIM GEUN TAEMoon Sung WookPARK JEONG HO
Citation
Nanotech 2003
Keywords
3D MEMS antenna; antenna; lithography; bonding; plastic micromachining
URI
https://pubs.kist.re.kr/handle/201004/106482
Appears in Collections:
KIST Conference Paper > Others
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