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Plasma source ion implantations for shallow junction

Authors

조정희; HAN SEUNG HEE; LEE YEON HEE; 김옥경; 김곤호; 황현상; 김영우; LIM HYUN EUI; JUNG, HYE SUN; 백성권

Citation

제19회 한국진공학회 학술발표회, pp.49

Keywords

shallow junction; PSII; rapid thermal annealer

URI

https://pubs.kist.re.kr/handle/201004/108278

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KIST Conference Paper > Others

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