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A laser plasma x-ray lithography for 2.5 THz waveguide cavity

Other Titles

2.5THz waveguide cavity를 위한 laser plasma x-ray lithography

Authors

Moon Sung Wook; KANG HO KWAN; Ju Byeong Kwon; LEE YUN HI; Jung Jae Hoon; 이상조; OH MYUNG HWAN; ICE Turcu; CM Mann

Citation

대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대, pp.11 - 16

Keywords

MEMS; LIGA; x-ray lithography

URI

https://pubs.kist.re.kr/handle/201004/110887

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KIST Conference Paper > Others

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