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Characteristics of SiNx films on wet-etched Si for field emission device

Other Titles

전계 방출 소자용으로 제조한 단결정 실리콘 기판에 증착된 실리콘 질화막에 대한 특성 연구

Authors

Jung Jae Hoon; Ju Byeong Kwon; LEE YUN HI; OH MYUNG HWAN; 장진

Citation

'95 대한전기학회 하계학술대회 논문집, pp.1137 - 1139

Keywords

field emission display; insulating film; electrical characteristics

URI

https://pubs.kist.re.kr/handle/201004/111803

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KIST Conference Paper > Others

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