Implantation of N-ion on sapphire substrate for GaN epilayer

Authors
Park, YJCho, YSKoh, EKKim, EKKim, GGByun, DJMin, SK
Issue Date
2001
Publisher
JAPAN SOCIETY APPLIED PHYSICS
Citation
International Microprocesses and Nanotechnology Conference, pp.222 - 223
URI
https://pubs.kist.re.kr/handle/201004/117915
Appears in Collections:
KIST Conference Paper > 2001
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