Characterization of fluorocarbon thin films deposited by ICP and PP

Authors
이지혜김강진이연희
Issue Date
2011-03
Citation
Journal of Surface Analysis, v.17, no.3, pp.269 - 273
Keywords
plasma polymerization; ICP; PP; fluorocarbon thin film
ISSN
1341-1756
URI
https://pubs.kist.re.kr/handle/201004/130553
Appears in Collections:
KIST Article > 2011
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