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Experimental study on wet thermal oxides for SOI fabrication

Other Titles

SOI 제작을 위한 습식 열산화막에 대한 실험적 고찰

Authors

변영태; 김형권

Issue Date

2003-05

Citation

새물리, v.v. 46, no.no. 5, pp.297 - 303

Keywords

실리콘 절연체; 스마트 절단; 산화

URI

https://pubs.kist.re.kr/handle/201004/138602

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KIST Article > 2003

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