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SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구

Other Titles

Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM

Authors

윤의성; 박지현; 양승호; 한흥구; 공호성; 고석근

Issue Date

2003-04

Citation

한국윤활학회지, v.v. 19, no.no. 2, pp.109 - 115

Keywords

nano-adhesion; nano-friction; hydrophobic film; tribology; SPM

ISSN

1229-4845

URI

https://pubs.kist.re.kr/handle/201004/138690

Appears in Collections:

KIST Article > 2003

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