KIST Library Institutional Repository

SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구

Other Titles

Nanotribological characteristics of plasma treated hydrophobic thin films on silicon surfaces using SPM

Authors

윤의성; 박지현; 양승호; 한흥구; 공호성; 고석근

Issue Date

2003-04

Citation

한국윤활학회지, v.v. 19, no.no. 2, pp.109 - 115

Keywords

nano-adhesion; nano-friction; hydrophobic film; tribology; SPM

ISSN

1229-4845

URI

https://pubs.kist.re.kr/handle/201004/138690

Appears in Collections:

KIST Article > 2003

Export

RIS (EndNote)

XLS (Excel)

XML