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Optical MEMS-MEMS 기술의 액츄에이터 응용 (III)

Authors

문성욱; 허재성

Issue Date

2002-11

Citation

월간 반도체, v.11, pp.41 - 52

Keywords

MEMS; 액츄에이터

ISSN

1227-741X

URI

https://pubs.kist.re.kr/handle/201004/139063

Appears in Collections:

KIST Article > 2002

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