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Preparation of AIN thin film with new type of single precursor

Other Titles

새로운 단일 전구체를 이용한 AIN 박막의 제조

Authors

안창규; 최승철; 한성환

Issue Date

2001-08

Publisher

한국세라믹학회

Citation

한국세라믹학회지 = Journal of the Korean Ceramic Society, v.38, no.8, pp.761 - 764.

Keywords

MOCVD

ISSN

1229-7801

URI

https://pubs.kist.re.kr/handle/201004/140268

Appears in Collections:

KIST Article > 2001

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