Design and fabrication of a micromechanical switch using polysilicon surface micromachining

Other Titles
다결정실리콘 표면 미세가공 기술을 이용한 초소형 기계식 스위치의 설계 및 제작
Authors
채경수한승오하종민문성욱박정호
Issue Date
2000-09
Publisher
대한전기학회
Citation
대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers, v.49, no.9, pp.546 - 552
Keywords
mechanical switch; MEMS; Logic Gate; actuator; surface micromaching
URI
https://pubs.kist.re.kr/handle/201004/141122
Appears in Collections:
KIST Article > 2000
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