Design and fabrication of a micromechanical switch using polysilicon surface micromachining
- Other Titles
- 다결정실리콘 표면 미세가공 기술을 이용한 초소형 기계식 스위치의 설계 및 제작
- Authors
- 채경수; 한승오; 하종민; 문성욱; 박정호
- Issue Date
- 2000-09
- Publisher
- 대한전기학회
- Citation
- 대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers, v.49, no.9, pp.546 - 552
- Keywords
- mechanical switch; MEMS; Logic Gate; actuator; surface micromaching
- URI
- https://pubs.kist.re.kr/handle/201004/141122
- Appears in Collections:
- KIST Article > 2000
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