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Design and fabrication of a micromechanical switch using polysilicon surface micromachining

Other Titles

다결정실리콘 표면 미세가공 기술을 이용한 초소형 기계식 스위치의 설계 및 제작

Authors

채경수; 한승오; 하종민; 문성욱; 박정호

Issue Date

2000-09

Publisher

대한전기학회

Citation

대한전기학회논문지 : 전기물성,응용부문 C = The Transactions of The Korean Institute of Electrical Engineers, v.49, no.9, pp.546 - 552

Keywords

mechanical switch; MEMS; Logic Gate; actuator; surface micromaching

URI

https://pubs.kist.re.kr/handle/201004/141122

Appears in Collections:

KIST Article > 2000

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