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Deeply etched InP/InGaAsP/InP Ridge-type waveguides fabricated by using chemically assisted ion beam etching (CAIBE)

Other Titles

Caibe 기법으로 제작된 깊게 식각된 InP/InGaAsP/InP Ridge 형태의 광도파로

Authors

변영태; 우덕하; 김선호; 정영철; 구본조; 신기철

Issue Date

2000-07

Publisher

한국물리학회

Citation

새물리, v.41, no.1, pp.41 - 47

Keywords

InP/InGaAs/InP 광도파로; CAIBE 식각기법; 직선 도파로; 곡선도파로; 삽입손실; 복사손실; 전파손실; 반사손실; 2D-FEM

ISSN

0374-4914

URI

https://pubs.kist.re.kr/handle/201004/141253

Appears in Collections:

KIST Article > 2000

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