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Facet evolution as a function of the surface migration length of Al0.5Ga0.5As/GaAs multilayers grown on mesa-patterned GaAs substrates

Other Titles

Mesa 모양으로 패턴된 GaAs 기판 위에 성장한 Al0.5Ga0.5As/GaAs 다층구조의 측면성장 형태의 변화

Authors

김효진; 박영균; 김성일; 김은규; 김태환

Issue Date

1999-07

Citation

응용물리, v.12, no.4, pp.378 - 383

Keywords

mesa pattern; Al0.5Ga0.5As/GaAs; multi-layered structure; lateral growth rate

ISSN

1013-7009

URI

https://pubs.kist.re.kr/handle/201004/142067

Appears in Collections:

KIST Article > Others

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