Facet evolution as a function of the surface migration length of Al0.5Ga0.5As/GaAs multilayers grown on mesa-patterned GaAs substrates

Other Titles
Mesa 모양으로 패턴된 GaAs 기판 위에 성장한 Al0.5Ga0.5As/GaAs 다층구조의 측면성장 형태의 변화
Authors
김효진박영균김성일김은규김태환
Issue Date
1999-07
Citation
응용물리, v.12, no.4, pp.378 - 383
Keywords
mesa pattern; Al0.5Ga0.5As/GaAs; multi-layered structure; lateral growth rate
ISSN
1013-7009
URI
https://pubs.kist.re.kr/handle/201004/142067
Appears in Collections:
KIST Article > Others
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