Facet evolution as a function of the surface migration length of Al0.5Ga0.5As/GaAs multilayers grown on mesa-patterned GaAs substrates
- Other Titles
- Mesa 모양으로 패턴된 GaAs 기판 위에 성장한 Al0.5Ga0.5As/GaAs 다층구조의 측면성장 형태의 변화
- Authors
- 김효진; 박영균; 김성일; 김은규; 김태환
- Issue Date
- 1999-07
- Citation
- 응용물리, v.12, no.4, pp.378 - 383
- Keywords
- mesa pattern; Al0.5Ga0.5As/GaAs; multi-layered structure; lateral growth rate
- ISSN
- 1013-7009
- URI
- https://pubs.kist.re.kr/handle/201004/142067
- Appears in Collections:
- KIST Article > Others
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