Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices

Other Titles
질소가 도핑된 DLC 막의 물성 조사 및 Mo-tip FEA 소자에의 응용
Authors
주병권정재훈김훈이윤희이남양오명환
Issue Date
1999-01
Publisher
大韓電氣學會
Citation
전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.48C, no.1, pp.18 - 22
Keywords
FED; field emission; Mo-tip FEA; DLC coating; N-doping; low-hydrogenated film; transconductance; electrical conductivity; optical band-gap
ISSN
0254-4172
URI
https://pubs.kist.re.kr/handle/201004/142481
Appears in Collections:
KIST Article > Others
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