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Investigation of physical properties of N-doped DLC film and its application to Mo-tip FEA devices

Other Titles

질소가 도핑된 DLC 막의 물성 조사 및 Mo-tip FEA 소자에의 응용

Authors

주병권; 정재훈; 김훈; 이윤희; 이남양; 오명환

Issue Date

1999-01

Publisher

大韓電氣學會

Citation

전기학회논문지 = Transactions of the Korean Institute of Electrical Engneers, v.48C, no.1, pp.18 - 22

Keywords

FED; field emission; Mo-tip FEA; DLC coating; N-doping; low-hydrogenated film; transconductance; electrical conductivity; optical band-gap

ISSN

0254-4172

URI

https://pubs.kist.re.kr/handle/201004/142481

Appears in Collections:

KIST Article > Others

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