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Deposition of piezoelectric PZT(53/47) film by metalorganic decomposition for microelectromechanical device

Other Titles

Microelectromechanical system 소자 제작을 위한 유기 금속분해법에 의한 압전성 PZT(53/47) 박막의 증착

Authors

윤영수; 정형진; 신영화

Issue Date

1998-06

Publisher

한국전기전자재료학회

Citation

전기전자재료학회논문지 (Journal of KIEEME), v.11, no.6, pp.458 - 464

Keywords

유기금속분해법

ISSN

1226-7945

URI

https://pubs.kist.re.kr/handle/201004/143029

Appears in Collections:

KIST Article > Others

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