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Applications of ion beam of a few keV for thin film growth and surface modification

Authors

고석근; 최원국; 장홍규; 윤영수; 송석균; 박성철; 조준식; 김기환; 정형진

Issue Date

1996-03

Citation

Ungyong Mulli (The Korean physical society), v.9, no.2, pp.199 - 206

Keywords

thin film

URI

https://pubs.kist.re.kr/handle/201004/144516

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KIST Article > Others

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