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Surface analysis of PZT film prepared by sputtering method

Other Titles

Sputtering법에 의해 성장시킨 PZT박막의 표면 분석

Authors

김영관; 박주상; 추정우; 손병청; 이전국

Issue Date

1996-01

Citation

한국진공학회지, v.5, no.2, pp.107 - 112

Keywords

스퍼터; PZT; 표면 분석

URI

https://pubs.kist.re.kr/handle/201004/144662

Appears in Collections:

KIST Article > Others

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