Copper film growth by chemical vapor deposition.

Other Titles
ICB seeding 에 의한 CVD Cu 박막의 증착 및 특성 분석 =
Authors
윤경렬최두진김석김기환고석근
Issue Date
1996-01
Citation
한국재료학회지 = Korean journal of materials research, v.v. 6, no.no. 7, pp.723 - ?
URI
https://pubs.kist.re.kr/handle/201004/144730
Appears in Collections:
KIST Article > Others
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