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Cu films on Si(100) by partially ionized beam deposition

Other Titles

부분 이온빔 증착법으로 제작한 silicon(100) 기판위의 구리 박막

Authors

장홍규; 김기환; 최성창; 최두진; 최원국; 손용배; 고석근; 정형진

Issue Date

1996-01

Citation

J. ISHM-Korea, The microelectronics society, v.3, no.2, pp.17 - ?

URI

https://pubs.kist.re.kr/handle/201004/144738

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KIST Article > Others

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