반도체 메모리 소자의 커패시터 유전막 및 그 제조 방법

Author
김성근이우철김상태송현철백승협에릭 라슨김진상강종윤크리스토퍼 빌라브스키염정환최지원
Assignee
한국과학기술연구원
Regitration Date
2020-02-27
Registration No.
10-2084608
Application Date
2018-04-25
Application No.
10-2018-0047915
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/79385
Appears in Collections:
KIST Patent > 2018
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