고주파 플라즈마 화학증착법을 이용한원형 기판용 코팅층의 대량 합성장 치 및 합성방법

Author
은광용이광렬
Assignee
한국과학기술연구원
Regitration Date
1997-12-05
Registration No.
131987
Application Date
1994-08-17
Application No.
94-20259
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/81893
Appears in Collections:
KIST Patent > Others
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