아연산화물 반도체의 금속배선 형성 방법

Author
최원국김경국이지면박성주
Assignee
한국과학기술연구원
Regitration Date
2003-03-12
Registration No.
377509
Application Date
2000-08-17
Application No.
00-47355
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/84664
Appears in Collections:
KIST Patent > 2000
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