변형된 저마늄을 포함하는 반도체 소자의 제조 방법 및 이에 의해 제조된 반도체 소자

Author
김형준김상현임희정김연수심재필
Assignee
한국과학기술연구원
Regitration Date
2019-12-10
Registration No.
10504771
Application Date
2017-01-26
Application No.
15/416727
Country
US
URI
https://pubs.kist.re.kr/handle/201004/86197
Appears in Collections:
KIST Patent > 2017
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