나노 인덴터를 위한 기체 교환 장치

Author
김소희홍지현백우석강인영안재평
Assignee
한국과학기술연구원
Regitration Date
2022-06-23
Registration No.
10-2413749-0000
Application Date
2020-08-13
Application No.
10-2020-0101573
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/88494
Appears in Collections:
KIST Patent > 2020
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