레이저 간섭 리소그래피를 이용한 상변화 메모리 제조방법

Author
김영환최진일김용태
Assignee
한국과학기술연구원
Regitration Date
2014-02-18
Registration No.
8,652,876
Application Date
2012-11-09
Application No.
13/672,943
Country
US
URI
https://pubs.kist.re.kr/handle/201004/89680
Appears in Collections:
KIST Patent > 2012
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