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레이저 간섭 리소그래피를 이용한 상변화 메모리 제조방법

Author

김영환; 최진일; 김용태

Assignee

한국과학기술연구원

Regitration Date

2014-02-18

Registration No.

8,652,876

Application Date

2012-11-09

Application No.

13/672,943

Country

US

URI

https://pubs.kist.re.kr/handle/201004/89680

Appears in Collections:

KIST Patent > 2012

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